Francis F. Chen , Jane P. Chang, "Lecture Notes on Principles of Plasma Processing"



Francis F. Chen , Jane P. Chang, "Lecture Notes on Principles of Plasma Processing"
Springer | January 31, 2003 | ISBN: 0306474972 | 208 pages | DjVu | 7 mb
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage.

http://hotfile.com/dl/55481276/eaba14f/Principles_of_plasma_processing_lecture_course.djvu.html
or
http://sharingmatrix.com/file/13205467/Principles_of_plasma_processing_lecture_course.djvu

Follow Rules!

You can

:
Vol.1. 2000 ebooks, 28 Gb Vol.2. 2000 ebooks, 9 Gb
Vol.3. 2000 ebooks, 35 Gb Vol.4. 2000 ebooks, 31 Gb

[Fast Download] Francis F. Chen , Jane P. Chang, "Lecture Notes on Principles of Plasma Processing"


Ebooks related to "Francis F. Chen , Jane P. Chang, "Lecture Notes on Principles of Plasma Processing"" :
Wilson Lines in Quantum Field Theory
Novel Superfluids: Volume 2
Novel Superfluids: Volume 1
Gravity Does Not Exist: A Puzzle for the 21st Century, 2nd edition
Forces in Physics (Greenwood Guides to Great Ideas in Science)
Relativity and the Nature of Spacetime
Optics: The Science of Vision
Quantum Mechanics: Foundations and Applications
The Sky at Einstein's Feet
String Phenomenology
Copyright Disclaimer:
This site does not store any files on its server. We only index and link to content provided by other sites. Please contact the content providers to delete copyright contents if any and email us, we'll remove relevant links or contents immediately.