Optical Scattering: Measurement and Analysis

Optical Scattering: Measurement and Analysis By John C. Stover
Publisher: S.P.I.E Publications 1995 | 340 Pages | ISBN: 0819419346 | File type: PDF | 23 mb

As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.

Introduction to Light Scatter
Surface Roughness
Scatter Calculations and Diffraction Theory
Calculation of Smooth-Surface Statistics from the BRDF
Polarization of Scattered Light
Scatter Measurements and Instrumentation
Scatter Predictions
Detection of Discrete Surface and Subsurface Defects
Industrial Applications
Scatter Specifications
Review of Electromagnetic Wave Propogation
Kirchhoff Diffraction from Sinusoidal Gratings




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