The Piezojunction Effect in Silicon Integrated Circuits and Sensors

The Piezojunction Effect in Silicon Integrated Circuits and Sensors

2002 | 174 Pages | ISBN: 1402070535 | PDF | 6.4 MB

This book describes techniques that can reduce mechanical-stress-induced inaccuracy and long-term instability in chips. The authors also show that the piezojunction effect can be applied for new types of mechanical-sensor structures. Thermo-mechanical stress is induced when packaged chips cool down to the temperature of application.

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