Updates in Advanced Lithography



ITAe| 2015 | ISBN: 9535111752 | 260 Pages | PDF | 24 MB

This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.

Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device.
One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer.
In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc.

Contents
Preface
Section 1 Lithography for 3D Structure and Nano Scale
1 Colloidal Lithography
2 Recent Advances in Two-Photon Stereolithography
3 Femtosecond Laser Lithography in Organic and Non-Organic Materials
4 Three-Dimensional Lithography Using Combination of Nanoscale Processing and Wet Chemical Etching
5 Combination of Lithography and Coating Methods for Surface Wetting Control
Section 2 Resist
6 Resist Homogeneity
Section 3 Nanoimprint
7 Soft UV Nanoimprint Lithography and Its Applications
8 Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography
Section 4 Fabrication of 3D Nano-Structure
9 The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate
10 Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography
with TOC BookMarkLinks

Download:

http://longfiles.com/okt3tzn859jr/-Updates_in_Advanced_Lithography-_ed._by_Sumio_Hosaka.pdf.html

[Fast Download] Updates in Advanced Lithography


Ebooks related to "Updates in Advanced Lithography" :
Electromagnetic Interactions
Lev D. Landau, Evgenij M. Lifsits, Fisica teorica VI. Meccanica dei fluidi
Advanced Methods of Continuum Mechanics for Materials and Structures
The Finite Element Analysis Program MSC Marc/Mentat: A First Introduction
Exploring Greenland: Cold War Science and Technology on Ice
Analytical Mechanics for Engineers
Quantum Paradoxes: Quantum Theory for the Perplexed
Applied Chemometrics for Scientists
Perovskites: Structure-Property Relationships
Advanced Gas Turbine Cycles: A Brief Review of Power Generation Thermodynamics
Copyright Disclaimer:
This site does not store any files on its server. We only index and link to content provided by other sites. Please contact the content providers to delete copyright contents if any and email us, we'll remove relevant links or contents immediately.